Preparation of silicon carbide coating by chemical vapor...

Surface and Coatings Technology 2018 / 01 Vol. 334

Preparation of silicon carbide coating by chemical vapor deposition by using hexamethyldisilylamine precursor

Wu, Qiang, Yu, Shu, Zhong, Hui, Li, Xiao, Xiao, Tao, Liu, Lihong, Guo, Xiaoning, Li, Yunping, Nie, Yan
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Volume:
334
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2017.11.017
Date:
January, 2018
File:
PDF, 2.73 MB
english, 2018
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