Study of spatial profiles of capacitively coupled VHF H...

Japanese Journal of Applied Physics 2017 / 01 Vol. 56; Iss. 1S

Study of spatial profiles of capacitively coupled VHF H 2 plasma by simulation

Chen, Kuan-Chen, Chiu, Kuo-Feng, Ogiwara, Kohei, Su, Li-Wen, Uchino, Kiichiro, Kawai, Yoshinobu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.01AC05
Date:
January, 2017
File:
PDF, 2.69 MB
english, 2017
Conversion to is in progress
Conversion to is failed