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Enhancing the sensitivity of three-axis detectable surface acoustic wave gyroscope by using a floating thin piezoelectric membrane
Lee, Munhwan, Lee, KeekeunVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.06GN14
Date:
June, 2017
File:
PDF, 4.71 MB
english, 2017