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Anneal induced transformations of defects in hadron irradiated Si wafers and Schottky diodes
Gaubas, E., Ceponis, T., Deveikis, L., Meskauskaite, D., Pavlov, J., Rumbauskas, V., Vaitkus, J., Moll, M., Ravotti, F.Volume:
75
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.11.035
Date:
March, 2018
File:
PDF, 1.75 MB
english, 2018