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Surface and Coatings Technology 2017 / 11

Superimposed high power impulse and middle frequency magnetron sputtering: Role of pulse duration and average power of middle frequency

Diyatmika, Wahyu, Liang, Fei-Ke, Lou, Bih-Show, Lu, Jong-Hong, Sun, De-En, Lee, Jyh-Wei
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2017.11.057
Date:
November, 2017
File:
PDF, 2.01 MB
english, 2017
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