A novel MEMS S-springs vibrating ring gyroscope with atmosphere package
Kou, Zhiwei, Liu, Jun, Cao, Huiliang, Shi, Yunbo, Ren, Jianjun, Zhang, YingjieVolume:
7
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5002156
Date:
December, 2017
File:
PDF, 15.28 MB
english, 2017