Optimization and limit of a tilt manipulation stage based on the electrowetting-on-dielectric principle
Tan, Xiao, Tao, Zhi, Suzuki, Kenji, Li, HaiwangVolume:
7
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5013323
Date:
December, 2017
File:
PDF, 15.07 MB
english, 2017