AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Plasma chemistry study of PLAD processes
Qin, Shu, Brumfield, Kyle, Liu, Lequn Jennifer, Hu, Yongjun Jeff, McTeer, Allen, Hsu, Wei Hui, Wang, MaoyingYear:
2012
Language:
english
DOI:
10.1063/1.4766568
File:
PDF, 388 KB
english, 2012