(Invited) The Dynamics of Nickelidation for Self-Aligned...

ECS Transactions 2017 / 08 Vol. 80; Iss. 1

(Invited) The Dynamics of Nickelidation for Self-Aligned Contacts to InGaAs Channels

Chen, Renjie, Dai, Xing, Jungjohann, Katherine L, Mook, William Moyer, Nogan, John, Soci, Cesare, Dayeh, Shadi
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Volume:
80
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08001.0053ecst
Date:
August, 2017
File:
PDF, 2.04 MB
english, 2017
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