(Invited) Characterization of Interfacial Dipoles at Dielectric Stacks by XPS Analysis
Miyazaki, Seiichi, Ohta, Akio, Fujimura, NobuyukiVolume:
80
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08001.0229ecst
Date:
August, 2017
File:
PDF, 373 KB
english, 2017