Topographic Complexities and Solutions for High Density...

ECS Transactions 2017 / 08 Vol. 80; Iss. 4

Topographic Complexities and Solutions for High Density BEOL MIM Capacitors

Cheng, Lili, Kakita, Shinichiro, Fox, Robert, Motoyama, Emiko, Lee, Jusang, Azad, Nabil, Hart, Gregory, Ham, Sun, Sharma, Ankur, Beaudoin, Felix, Zhang, Galor Wenyi, de la Garza, Ernesto Gene, Babighi
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Volume:
80
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08004.0233ecst
Date:
August, 2017
File:
PDF, 603 KB
english, 2017
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