Thermal Evolution of Implantation Damages in Mg-Implanted...

ECS Transactions 2017 / 08 Vol. 80; Iss. 7

Thermal Evolution of Implantation Damages in Mg-Implanted GaN Layers Grown on Si

Lardeau-Falcy, Aurélien, Coig, Marianne, Charles, Matthew, Licitra, Christophe, Kanyandekwe, Joël, Milesi, Frederic, Eymery, Joel, Mazen, Frédéric
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Volume:
80
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08007.0131ecst
Date:
August, 2017
File:
PDF, 2.55 MB
english, 2017
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