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Initiatives of Precision Engineering at the Beginning of a Millennium || Flatness Measurement System using Fizeau Type Solid Interferometer with High Speed Acquiring Multi-phase Interferograms and Highly Effective Error Decreasing Algorithm
Inasaki, IchiroVolume:
10.1007/b1
Year:
2002
Language:
english
DOI:
10.1007/0-306-47000-4_160
File:
PDF, 485 KB
english, 2002