Multislice imaging of integrated circuits by precession...

Acta Crystallographica Section A Foundations and Advances 2018 / 01 Vol. 74; Iss. 1

Multislice imaging of integrated circuits by precession X-ray ptychography

Shimomura, Kei, Hirose, Makoto, Takahashi, Yukio
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Volume:
74
Language:
english
Journal:
Acta Crystallographica Section A Foundations and Advances
DOI:
10.1107/S205327331701525X
Date:
January, 2018
File:
PDF, 732 KB
english, 2018
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