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Parameters Optimization and Experiment of A Planar Parallel 3-DOF Nanopositioning System
Wang, Ruizhou, Zhang, XianminVolume:
65
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/TIE.2017.2736502
Date:
March, 2018
File:
PDF, 1.30 MB
english, 2018