Influence of baking conditions on 3D microstructures by...

Journal of Laser Applications 2017 / 11 Vol. 29; Iss. 4

Influence of baking conditions on 3D microstructures by direct laser writing in negative photoresist SU-8 via two-photon polymerization

Tsutsumi, Naoto, Sakamoto, Nanaho, Nakamura, Ryotaro, Kinashi, Kenji, Sakai, Wataru
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Volume:
29
Language:
english
Journal:
Journal of Laser Applications
DOI:
10.2351/1.5010756
Date:
November, 2017
File:
PDF, 1.61 MB
english, 2017
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