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Impact of strain state on the ultrathin AlN/GaN superlattice growth on Si(110) substrates by metalorganic chemical vapor deposition
Shen, Xu-Qiang, Takahashi, Tokio, Ide, Toshihide, Shimizu, MitsuakiVolume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.010306
Date:
January, 2018
File:
PDF, 1.18 MB
english, 2018