![](/img/cover-not-exists.png)
Investigation of reaction mechanisms in the chemical vapor deposition of al from DMEAA
Psarellis, George M., Aviziotis, Ioannis G., Duguet, Thomas, Vahlas, Constantin, Koronaki, Eleni D., Boudouvis, Andreas G.Volume:
177
Language:
english
Journal:
Chemical Engineering Science
DOI:
10.1016/j.ces.2017.12.006
Date:
February, 2018
File:
PDF, 1.06 MB
english, 2018