Nano-coated long-period gratings for detection of sub-nanometric changes in thin-film thickness
Śmietana, Mateusz, Mikulic, Predrag, Bock, Wojtek J.Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.12.052
Date:
December, 2017
File:
PDF, 435 KB
english, 2017