Substantial difference in target surface chemistry between reactive dc and high power impulse magnetron sputtering
Greczynski, Grzegorz, Mraz, Stanislav, Schneider, Jochen M, Hultman, LarsLanguage:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aaa0ee
Date:
December, 2017
File:
PDF, 321 KB
english, 2017