Chemical vapor deposition of TiN on transition metal substrates
von Fieandt, L., Larsson, T., Lindahl, E., Bäcke, O., Boman, M.Volume:
334
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2017.11.063
Date:
January, 2018
File:
PDF, 4.50 MB
english, 2018