Origin of Initial Current Peak in High Power Impulse...

Chinese Physics Letters 2016 / 07 Vol. 33; Iss. 7

Origin of Initial Current Peak in High Power Impulse Magnetron Sputtering and Verification by Non-Sputtering Discharge

Wu, Zhong-Zhen, Xiao, Shu, Cui, Sui-Han, Fu, Ricky K. Y., Tian, Xiu-Bo, Chu, Paul K., Pan, Feng
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Volume:
33
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/33/7/075201
Date:
July, 2016
File:
PDF, 441 KB
english, 2016
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