Realizing ferroelectric Hf 0.5...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 01 Vol. 36; Iss. 1

Realizing ferroelectric Hf 0.5 Zr 0.5 O 2 with elemental capping layers

Lin, Yuh-Chen, McGuire, Felicia, Franklin, Aaron D.
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5002558
Date:
January, 2018
File:
PDF, 1.41 MB
english, 2018
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