Design of a XYZ scanner for home-made high-speed atomic force microscopy
Cai, Kunhai, He, Xianbin, Tian, Yanling, Liu, Xianping, Zhang, Dawei, Shirinzadeh, BijanLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3674-4
Date:
December, 2017
File:
PDF, 2.90 MB
english, 2017