Development of buffer layer structure for epitaxial growth...

Japanese Journal of Applied Physics 2017 / 07 Vol. 56; Iss. 7

Development of buffer layer structure for epitaxial growth of (100)/(001)Pb(Zr,Ti)O 3 -based thin film on (111)Si wafer

Hayasaka, Takeshi, Yoshida, Shinya, Tanaka, Shuji
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.071501
Date:
July, 2017
File:
PDF, 3.50 MB
english, 2017
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