Enhancement in structure stability of gold micro-cantilever...

Microelectronic Engineering 2018 / 02 Vol. 187-188

Enhancement in structure stability of gold micro-cantilever by constrained fixed-end in MEMS devices

Teranishi, Minami, Chen, Chun-Yi, Chang, Tso-Fu Mark, Konishi, Toshifumi, Yamane, Daisuke, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato
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Volume:
187-188
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.11.015
Date:
February, 2018
File:
PDF, 886 KB
english, 2018
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