Low-resistivity α-phase tungsten films grown by hot-wire...

Thin Solid Films 2018 / 01 Vol. 646

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, Mengdi, Aarnink, Antonius A.I., Schmitz, Jurriaan, Kovalgin, Alexey Y.
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Volume:
646
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.12.011
Date:
January, 2018
File:
PDF, 2.73 MB
english, 2018
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