High-temperature annealing of macroporous silicon in an...

Semiconductors 2017 / 9 Vol. 51; Iss. 9

High-temperature annealing of macroporous silicon in an inert-gas flow

Astrova, E. V., Preobrazhenskiy, N. E., Pavlov, S. I., Voronkov, V. B.
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Volume:
51
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782617090032
Date:
September, 2017
File:
PDF, 3.07 MB
english, 2017
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