Design and optimization of stress centralized MEMS vector...

Mechanical Systems and Signal Processing 2018 / 05 Vol. 104

Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency

Zhang, Guojun, Ding, Junwen, Xu, Wei, Liu, Yuan, Wang, Renxin, Han, Janjun, Bai, Bing, Xue, Chenyang, Liu, Jun, Zhang, Wendong
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Volume:
104
Language:
english
Journal:
Mechanical Systems and Signal Processing
DOI:
10.1016/j.ymssp.2017.11.027
Date:
May, 2018
File:
PDF, 3.53 MB
english, 2018
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