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Effect of temperature on deposition layer formation in HBr/N 2 /fluorocarbon-based plasma
Iwase, Taku, Yokogawa, Kenetsu, Mori, MasahitoVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.06HB04
Date:
June, 2017
File:
PDF, 1.89 MB
english, 2017