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Development of an UV rolling system for fabrication of micro/nano structure on polymeric films using a gas-roller-sustained seamless PDMS mold
Lee, Yun-Heng, Ke, Kun-Cheng, Chang, Nai-Wen, Yang, Sen-YueLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3683-3
Date:
January, 2018
File:
PDF, 1.72 MB
english, 2018