Impact of the Shape of the Differentially Pumped Chamber on...

ECS Transactions 2017 / 12 Vol. 81; Iss. 1

Impact of the Shape of the Differentially Pumped Chamber on Critical Flow Character

Hlavatá, Pavla, Maxa, Jiří, Bílek, Michal, Neděla, Vilém
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Volume:
81
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08101.0317ecst
Date:
December, 2017
File:
PDF, 284 KB
english, 2017
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