Solid-state dewetting of single-crystal silicon on...

Microelectronic Engineering 2018 / 04 Vol. 190

Solid-state dewetting of single-crystal silicon on insulator: effect of annealing temperature and patch size

Abbarchi, Marco, Naffouti, Meher, Lodari, Mario, Salvalaglio, Marco, Backofen, Rainer, Bottein, Thomas, Voigt, Axel, David, Thomas, Claude, Jean-Benoît, Bouabdellaoui, Mohammed, Benkouider, Abdelmalek
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Volume:
190
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.01.002
Date:
April, 2018
File:
PDF, 455 KB
english, 2018
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