Size measurements of standard nanoparticles using metrological atomic force microscope and evaluation of their uncertainties
Misumi, Ichiko, Sugawara, Kentaro, Takahata, Keiji, Takahashi, Kayori, Ehara, KenseiVolume:
51
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2017.11.013
Date:
January, 2018
File:
PDF, 2.57 MB
english, 2018