Metal oxide multilayer hard mask system for 3D...

Nanotechnology 2018 / 02 Vol. 29; Iss. 5

Metal oxide multilayer hard mask system for 3D nanofabrication

Han, Zhongmei, Salmi, Emma, Vehkamäki, Marko, Leskelä, Markku, Ritala, Mikko
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Volume:
29
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aa9fe0
Date:
February, 2018
File:
PDF, 2.34 MB
english, 2018
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