Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WNxCy Thin Films
Nolan, Michelle M., Touchton, Alexander J., Richey, Nathaniel E., Ghiviriga, Ion, Rocca, James R., Abboud, Khalil A., McElwee-White, LisaLanguage:
english
Journal:
European Journal of Inorganic Chemistry
DOI:
10.1002/ejic.201701225
Date:
December, 2017
File:
PDF, 1.52 MB
english, 2017