Influence of substrate bias voltage on crystallographic...

Materials Science in Semiconductor Processing 2018 / 03 Vol. 76

Influence of substrate bias voltage on crystallographic structure, optical and electronic properties of Al/(Ta 2 O 5 ) 0.85 (TiO 2 ) 0.15 /p-Si MIS Schottky barrier diodes fabricated by dc magnetron sputtering

Sekhar, M. Chandra, Reddy, N. Nanda Kumar, Reddy, B. Purusottam, Prakash, B. Poorna, Akkera, Harish Sharma, Uthanna, S., Park, Si-Hyun
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Volume:
76
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.01.001
Date:
March, 2018
File:
PDF, 823 KB
english, 2018
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