Thin-film repulsive-force electrostatic actuators

Sensors and Actuators A: Physical 2018 / 02 Vol. 270

Thin-film repulsive-force electrostatic actuators

Schaler, Ethan W., Zohdi, Tarek I., Fearing, Ronald S.
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Volume:
270
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.12.054
Date:
February, 2018
File:
PDF, 3.25 MB
english, 2018
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