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Thin-film repulsive-force electrostatic actuators
Schaler, Ethan W., Zohdi, Tarek I., Fearing, Ronald S.Volume:
270
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.12.054
Date:
February, 2018
File:
PDF, 3.25 MB
english, 2018