Influence of Si precursor type on the surface roughening of...

Influence of Si precursor type on the surface roughening of SiGe epitaxial layers deposited by ultrahigh vacuum chemical vapor deposition method

Kim, Youngmo, Yoon, Sungyeol, Ko, Daehong, Sohn, Hyunchul
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4986490
Date:
July, 2017
File:
PDF, 1.55 MB
english, 2017
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