Preparation of W-W 2 B composites from W-BN powders and properties of W-B-N barrier for copper metallization
Ivanov, E., del Rio, E.Volume:
72
Language:
english
Journal:
International Journal of Refractory Metals and Hard Materials
DOI:
10.1016/j.ijrmhm.2017.12.007
Date:
April, 2018
File:
PDF, 849 KB
english, 2018