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Effect of oxygen flow rate on microstructure properties of SiO 2 thin films prepared by ion beam sputtering
Wang, Lishuan, Jiang, Yugang, Jiang, Chenghui, Liu, Huasong, Ji, Yiqin, Zhang, Feng, Fan, Rongwei, Chen, DeyingVolume:
482
Language:
english
Journal:
Journal of Non-Crystalline Solids
DOI:
10.1016/j.jnoncrysol.2017.12.046
Date:
February, 2018
File:
PDF, 624 KB
english, 2018