Pulsed DC magnetron sputtered titanium nitride thin films...

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Sensors and Actuators A: Physical 2018 / 1

Pulsed DC magnetron sputtered titanium nitride thin films for localized heating applications in MEMS devices

M.A., Jithin, Ganapathi, K.L., Vikram, G.N.V.R., Udayashankar, N.K., Mohan, S.
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Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.12.066
Date:
January, 2018
File:
PDF, 455 KB
english, 2018
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