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The influence of oxygen ratio on the plasma parameters of argon RF inductively coupled discharge
Wang, Yong, Chen, Junfang, Wang, Yan, Xiong, WenwenVolume:
149
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.01.008
Date:
March, 2018
File:
PDF, 1.11 MB
english, 2018