Fabrication of 3D nanovolcano-shaped nanopores with helium...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 01 Vol. 36; Iss. 1

Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy

Wang, Haitao, Xie, Wanyi, Wang, Yunjiao, Zhu, Jifeng, Liu, Mengwan, Lu, Wenqiang, Deng, Yunsheng, Wang, Guodong, Wang, Deqiang
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5001927
Date:
January, 2018
File:
PDF, 4.96 MB
english, 2018
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