A novel vibration assisted polishing device based on the...

AIP Advances 2018 / 01 Vol. 8; Iss. 1

A novel vibration assisted polishing device based on the flexural mechanism driven by the piezoelectric actuators

Wang, Guilian, Zhou, Xiaoqin, Ma, Peiqun, Wang, Rongqi, Meng, Guangwei, Yang, Xu
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Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5009027
Date:
January, 2018
File:
PDF, 20.05 MB
english, 2018
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