Miniaturized magnet-less RF electron trap. II. Experimental...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2017 / 07 Vol. 35; Iss. 4

Miniaturized magnet-less RF electron trap. II. Experimental verification

Deng, Shiyang, Green, Scott R., Markosyan, Aram H., Kushner, Mark J., Gianchandani, Yogesh B.
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4984752
Date:
July, 2017
File:
PDF, 2.06 MB
english, 2017
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