Microwave plasma annealing of sol-gel deposited tantalum...

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Vacuum 2018 / 1

Microwave plasma annealing of sol-gel deposited tantalum oxide and zinc oxide films

Ramadam, Rehab, Gabriel Simiz, Jean, Ynsa, María Dolores, Manso Silván, Miguel
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Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.01.007
Date:
January, 2018
File:
PDF, 8.16 MB
english, 2018
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