Application of low pressure capacitively coupled rf...

Application of low pressure capacitively coupled rf hydrogen plasma for low temperature reduction of iron clusters in structure of fe-pillared materials

Starshinova, V L, Gorelysheva, V E, Shinkarev, A A, Gnevashev, S G, Kulevtsov, G N, Shinkarev, A A
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Volume:
789
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/789/1/012057
Date:
January, 2017
File:
PDF, 1.38 MB
english, 2017
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