Axial distribution of a VHF H 2...

Japanese Journal of Applied Physics 2016 / 01 Vol. 55; Iss. 1S

Axial distribution of a VHF H 2 plasma produced by a narrow gap discharge

Chen, Kuan-Chen, Chen, Chia-Fu, Lien, Cheng-Yang, Chiu, Kuo-Feng, Shi, Jen-Bin, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
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Volume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.01AH01
Date:
January, 2016
File:
PDF, 2.42 MB
english, 2016
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