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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Optima MDxt: A high throughput 335 keV mid-dose implanter
Eisner, Edward, David, Jonathan, Justesen, Perry, Kamenitsa, Dennis, McIntyre, Edward, Rathmell, Robert, Ray, Andrew, Rzeszut, RichardYear:
2012
Language:
english
DOI:
10.1063/1.4766558
File:
PDF, 539 KB
english, 2012